The influence of oblique angle deposition on the surface morphological and
microstructure of metallic cadmium films are studied. The films were deposited
normally and obliquely at different angles (0º
, 50º
and 70º
) by vacuum evaporation
technique. XRD technique used to study the crystalline structure of these films and
shows that the polycrystalline nature of these films and All layers irrespective of
deposition parameters develop a preferred (002) plane. The grain size increased
with the increase of deposition angle and clearly facetted morphology was
observed. The surface morphology of the deposited materials has been studied
using atomic force microscopes (AFM) and optical reflection microscope. The
AFM results demonstrate that the film deposition at higher oblique angle (70°) has
higher surface roughness. Reflection microscope results showed that the
smoothness and homogeneity of the films are decreasing with increasing the
deposition angle d), and the surface roughness increased with increasing angle. The
optical characteristics of the prepared thin films have been investigated by UV-VIS
spectrophotometer in a wavelength ranging (350-900) nm and shows by increasing
the inclination angle of deposition will lead to transmission decreases of
the films.
Keywords: Glancing angle deposition, cadmium thin films, AFM, Morphology.
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